@article{a789313602094866b898cae14526fe00,
title = "Proceedings of the 20th International Conference on Ion Beam Modification of Materials (IBMM 2016)",
author = "John Kennedy and Robert Elliman and Jeffrey Mccallum and Mihail Ionescu and Andreas Markwitz",
year = "2017",
month = oct,
day = "15",
doi = "10.1016/j.nimb.2017.09.014",
language = "English",
volume = "409",
pages = "1",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier B.V.",
}