PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

J. S. Williams; D. J. Chivers; R. G. Elliman; S. T. Johnson; E. M. Lawson; I. V. Mitchell; K. G. Orrman-Rossiter; A. P. Pogany; K. T. Short

PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

J. S. Williams^*, D. J. Chivers, R. G. Elliman, S. T. Johnson, E. M. Lawson, I. V. Mitchell, K. G. Orrman-Rossiter, A. P. Pogany, K. T. Short

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

11 Citations (Scopus)

Original language	English
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	North Holland
Pages	205-210
Number of pages	6
ISBN (Print)	0444008691
Publication status	Published - 1984

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	27
ISSN (Print)	0272-9172

Cite this

Williams, J. S., Chivers, D. J., Elliman, R. G., Johnson, S. T., Lawson, E. M., Mitchell, I. V., Orrman-Rossiter, K. G., Pogany, A. P., & Short, K. T. (1984). PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION. In Materials Research Society Symposia Proceedings (pp. 205-210). (Materials Research Society Symposia Proceedings; Vol. 27). North Holland.

@inproceedings{ffdb61ab8df04513ac1c8a685a540e53,

title = "PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.",

author = "Williams, {J. S.} and Chivers, {D. J.} and Elliman, {R. G.} and Johnson, {S. T.} and Lawson, {E. M.} and Mitchell, {I. V.} and Orrman-Rossiter, {K. G.} and Pogany, {A. P.} and Short, {K. T.}",

year = "1984",

language = "English",

isbn = "0444008691",

series = "Materials Research Society Symposia Proceedings",

publisher = "North Holland",

pages = "205--210",

booktitle = "Materials Research Society Symposia Proceedings",

}

PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION. / Williams, J. S.; Chivers, D. J.; Elliman, R. G. et al.
Materials Research Society Symposia Proceedings. North Holland, 1984. p. 205-210 (Materials Research Society Symposia Proceedings; Vol. 27).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

AU - Williams, J. S.

AU - Chivers, D. J.

AU - Elliman, R. G.

AU - Johnson, S. T.

AU - Lawson, E. M.

AU - Mitchell, I. V.

AU - Orrman-Rossiter, K. G.

AU - Pogany, A. P.

AU - Short, K. T.

PY - 1984

Y1 - 1984

UR - http://www.scopus.com/inward/record.url?scp=0021312579&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0021312579

SN - 0444008691

T3 - Materials Research Society Symposia Proceedings

SP - 205

EP - 210

BT - Materials Research Society Symposia Proceedings

PB - North Holland

ER -

PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

Publication series

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