Proton-irradiation-induced intermixing of InGaAs quantum dots

P. Lever*, H. H. Tan, C. Jagadish, P. Reece, M. Gal

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    43 Citations (Scopus)

    Abstract

    The interdiffusion processes in InGaAs quantum dots caused by proton irradiation and annealing were studied. Proton irradiation was used on a single layer of InGaAs quantum dots, grown by metalorganic chemical vapor deposition. Photoluminescence (PL) energy shifts were found to increase with proton dose for the doses studied. Implantation at elevated temperatures reduced the amount of PL energy shift, but enhanced recovery of the luminescence was observed.

    Original languageEnglish
    Pages (from-to)2053-2055
    Number of pages3
    JournalApplied Physics Letters
    Volume82
    Issue number13
    DOIs
    Publication statusPublished - 31 Mar 2003

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