Quantification of Sheet Resistance in Boron-Diffused Silicon Using Micro-Photoluminescence Spectroscopy at Room Temperature

Hieu T. Nguyen^*, Steve Johnston, Appu Paduthol, Steven P. Harvey, Sieu Pheng Phang, Christian Samundsett, Chang Sun, Di Yan, Thorsten Trupke, Mowafak M. Al-Jassim, Daniel Macdonald

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review