Rear Passivation and Point Contacts Formation by Laser Process through Stacks of a-Si:H(i) and a-Si:B/Sb for High Efficiency Silicon Solar Cell

Young Han, Evan Franklin, Xinyu Zhang, Andrew Thomson, Marco Ernst

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    In this work we investigate the effectiveness of deposited, boron- (for p-type) or antimony-doped (for n-type), amorphous silicon (a-Si:B/Sb) layers for producing multi-purpose films capable of providing both excellent surface passivation and effective localized doping via laser irradiation. We deposit, via sputtering or via a combination of PECVD and sputtering, layers of a-Si:B/Sb or stacks of a-Si:H(i) and a-Si:B/Sb on crystalline silicon substrates, and subsequently employ a KrF 248 nm nanosecond laser to simultaneously remove the film and dope the sub-surface region beneath the film. Sheet resistance measurements indicate that a high level of doping is achieved in laser processed regions for quite a broad range of laser parameters and dopant fractions in deposited films, with sheet resistance as low as around 10 Ω/□ being observed. Furthermore, we evaluate and investigate the passivation capabilities of the films in non-laser processed regions and also determine the recombination properties of the locally laser doped contact regions, thus providing an indication of the efficiency potential of PERL type cells utilising these multi-purpose films with laser-doped local contacts.
    Original languageEnglish
    Title of host publicationProceedings of the 32nd European Photovoltaic Solar Energy Conference
    Place of PublicationMunich, Germany
    PublisherWIP Wirtschaft und Infrastuktur GmbH & Co Planungs KG
    Pages621-624pp
    Editionto be checked
    ISBN (Print)3936338418
    DOIs
    Publication statusPublished - 2016
    Event32nd European Photovoltaic Solar Energy Conference and Exhibition EU PVSEC 2016 - Munich, Germany
    Duration: 1 Jan 2016 → …
    https://www.eupvsec-proceedings.com

    Conference

    Conference32nd European Photovoltaic Solar Energy Conference and Exhibition EU PVSEC 2016
    Period1/01/16 → …
    OtherJune 21-24 2016
    Internet address

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