Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

Andreas Fell, Sybille Hopman, Nandor Vago, Sven Kluska, Evan Franklin, Klaus Weber

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.
    Original languageEnglish
    Title of host publicationLight, Energy and the Environment, OSA Technical Digest
    Place of PublicationUSA
    PublisherOptica Publishing Group
    EditionPeer Reviewed
    ISBN (Print)9781557527561
    DOIs
    Publication statusPublished - 2014
    EventOptics for Solar Energy - Canberra, Australia, Australia
    Duration: 1 Jan 2014 → …
    http://www.opticsinfobase.org/abstract.cfm?URI=OSE-2014-RW4B.5

    Conference

    ConferenceOptics for Solar Energy
    Country/TerritoryAustralia
    Period1/01/14 → …
    OtherDecember 2-5 2014
    Internet address

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