@inproceedings{ac2c668c2bc846f69bf8dbb2cc0f65da,
title = "RELATIONSHIP BETWEEN PECVD SILICON NITRIDE FILM COMPOSITION AND SURFACE AND EDGE PASSIVATION",
author = "Florence Chen and I Romijn and Arthur Weeber and Jason Tan and Brett Hallam and Cotter, {Jeffrey E}",
year = "2007",
language = "English",
pages = "1053--1060",
editor = "{Conference Program Committee}",
booktitle = "Proceedings of the European Photovoltaic Solar Energy Conference",
publisher = "WIP-Renewable Energies",
edition = "Peer Reviewed",
note = "European Photovoltaic Solar Energy Conference 2007 ; Conference date: 01-01-2007",
}