TY - GEN
T1 - Relative performance of spiral scan over raster scan in the AFM imaging
AU - Rana, M. S.
AU - Pota, H. R.
AU - Petersen, I. R.
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2016/3/7
Y1 - 2016/3/7
N2 - In this paper, we first consider the use of a spiral rather than the conventional raster scanning method for improving the imaging performance of an atomic force microscope (AFM). To generate spirals, single-frequency, slowly varying amplitude sine and cosine waves are applied to the X-and Y-piezos, respectively, of the piezoelectric tube scanner (PTS) of an AFM. To demonstrate the performance improvement with the spiral scanning method, a comparison of spiral and raster scanning techniques is presented. In each case, the closed-loop operation is performed using a multi-input multi-output (MIMO) model predictive control (MPC) scheme augmented with a vibration compensator to minimize the tracking error.
AB - In this paper, we first consider the use of a spiral rather than the conventional raster scanning method for improving the imaging performance of an atomic force microscope (AFM). To generate spirals, single-frequency, slowly varying amplitude sine and cosine waves are applied to the X-and Y-piezos, respectively, of the piezoelectric tube scanner (PTS) of an AFM. To demonstrate the performance improvement with the spiral scanning method, a comparison of spiral and raster scanning techniques is presented. In each case, the closed-loop operation is performed using a multi-input multi-output (MIMO) model predictive control (MPC) scheme augmented with a vibration compensator to minimize the tracking error.
KW - Atomic force microscope
KW - model predictive control
KW - piezoelectric tube scanner
KW - raster scan
KW - spiral scan
UR - http://www.scopus.com/inward/record.url?scp=84966692461&partnerID=8YFLogxK
U2 - 10.1109/CEEE.2015.7428259
DO - 10.1109/CEEE.2015.7428259
M3 - Conference contribution
T3 - ICEEE 2015 - 1st International Conference on Electrical and Electronic Engineering
SP - 217
EP - 220
BT - ICEEE 2015 - 1st International Conference on Electrical and Electronic Engineering
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1st International Conference on Electrical and Electronic Engineering, ICEEE 2015
Y2 - 4 November 2015 through 6 November 2015
ER -