TY - JOUR
T1 - Reliable ERD analysis of group-III nitrides despite severe nitrogen depletion
AU - Shrestha, Santosh K.
AU - Butcher, K. Scott A.
AU - Wintrebert-Fouquet, Marie
AU - Timmers, Heiko
PY - 2004/6
Y1 - 2004/6
N2 - ERD analysis of different group-III nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected employing a gas ionisation detector with large detection solid angle. The nitrogen depletion in the irradiated film volume has been measured as a function of incident ion fluence. Severe depletion rates have been observed for GaN and InN films, resulting in the eventual loss of all nitrogen, with InN losing nitrogen more than ten times faster than GaN. For GaN a delayed onset of the nitrogen depletion is apparent. A two parameter bulk molecular recombination model describes the nitrogen depletion well and enables reliable extrapolations of the original nitrogen content of GaN and InN films. A refinement of the model may be possible by considering the diffusion of nitrogen radicals.
AB - ERD analysis of different group-III nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected employing a gas ionisation detector with large detection solid angle. The nitrogen depletion in the irradiated film volume has been measured as a function of incident ion fluence. Severe depletion rates have been observed for GaN and InN films, resulting in the eventual loss of all nitrogen, with InN losing nitrogen more than ten times faster than GaN. For GaN a delayed onset of the nitrogen depletion is apparent. A two parameter bulk molecular recombination model describes the nitrogen depletion well and enables reliable extrapolations of the original nitrogen content of GaN and InN films. A refinement of the model may be possible by considering the diffusion of nitrogen radicals.
KW - Compositional analysis
KW - Elastic recoil detection
KW - Gallium nitride films
KW - Indium nitride films
KW - Ion beam analysis
KW - Radiation effects in semiconductors
UR - http://www.scopus.com/inward/record.url?scp=2442476064&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2004.01.143
DO - 10.1016/j.nimb.2004.01.143
M3 - Conference article
SN - 0168-583X
VL - 219-220
SP - 686
EP - 692
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
T2 - Proceedings of the Sixteenth International Conference on Ion
Y2 - 29 June 2003 through 4 July 2003
ER -