TY - GEN
T1 - Robust H∞ control in nano-positioning
AU - Chunag, Ning
AU - Petersen, Ian R.
PY - 2010
Y1 - 2010
N2 - This paper considers the use of robust H∞ tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H∞ controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
AB - This paper considers the use of robust H∞ tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H∞ controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
UR - http://www.scopus.com/inward/record.url?scp=78649406759&partnerID=8YFLogxK
U2 - 10.1109/CCA.2010.5611252
DO - 10.1109/CCA.2010.5611252
M3 - Conference contribution
SN - 9781424453627
T3 - Proceedings of the IEEE International Conference on Control Applications
SP - 2237
EP - 2244
BT - 2010 IEEE International Conference on Control Applications, CCA 2010
T2 - 2010 IEEE International Conference on Control Applications, CCA 2010
Y2 - 8 September 2010 through 10 September 2010
ER -