@inproceedings{1335da8644904082b8203e0f669141e0,
title = "Robust H∞ control in fast atomic force microscopy",
abstract = "This paper presents the design of a robust H∞ controller for fast tracking of an Atomic Force Microscope (AFM). The controller design is based on a physical model of the AFM piezoelectric tube positioner. External capacitors are connected in series with the x and y contacts of the piezoelectric tube to provide measured voltages which are proportional to the charge on the actuator. The parameters for a nonlinear hysteresis model are obtained from measurements of the system frequency response and time domain response. Experimental results show that the robust H∞ controller can increase the scanning speed significantly.",
author = "Ning Chuang and Petersen, {Ian R.} and Pota, {Himanshu R.}",
year = "2011",
language = "English",
isbn = "9781457700804",
series = "Proceedings of the American Control Conference",
pages = "2258--2265",
booktitle = "Proceedings of the 2011 American Control Conference, ACC 2011",
note = "2011 American Control Conference, ACC 2011 ; Conference date: 29-06-2011 Through 01-07-2011",
}