Robust spiral positioning control of a piezoelectric tube scanner

H. Habibullah, H. R. Pota, I. R. Petersen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, a robust spiral positioning of a piezoelectric tube scanner (PTS) used in an atomic force microscope (AFM) is proposed. A minimax linear quadratic Gaussian (LQG) controller is designed based on an uncertainty system model which is constructed by measuring the modeling error between the measured and model frequency response. This controller is robust against uncertainties introduced as a result of spillover dynamics of the scanner at frequencies after the first resonance frequency (900 Hz) of the scanner and variation in plant transfer functions due to temperature and humidity. The proposed scheme provides sufficient damping at resonant modes to track the reference sinusoidal signal. The experimental results demonstrate that sufficiently high positioning accuracy is achieved using the proposed control scheme.

Original languageEnglish
Title of host publication2015 IEEE Conference on Control and Applications, CCA 2015 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages852-857
Number of pages6
ISBN (Electronic)9781479977871
DOIs
Publication statusPublished - 4 Nov 2015
Externally publishedYes
EventIEEE Conference on Control and Applications, CCA 2015 - Sydney, Australia
Duration: 21 Sept 201523 Sept 2015

Publication series

Name2015 IEEE Conference on Control and Applications, CCA 2015 - Proceedings

Conference

ConferenceIEEE Conference on Control and Applications, CCA 2015
Country/TerritoryAustralia
CitySydney
Period21/09/1523/09/15

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