Role of implantation-induced defects on the response time of semiconductor saturable absorbers

H. H. Tan*, C. Jagadish, M. J. Lederer, B. Luther-Davies, J. Zou, D. J.H. Cockayne, M. Haiml, U. Siegner, U. Keller

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    25 Citations (Scopus)

    Abstract

    To shorten the response times of GaAs-based saturable absorber structures, arsenic ion implantation with thermal annealing was employed. Results showed that both the concentration and type of residual defects determines the ultimate shortening of the carrier lifetime. To eliminate amorphization, poor recrystallization and polycrystalline layers after annealing, high implantation doses should be avoided since the response time is increased under these conditions.

    Original languageEnglish
    Pages (from-to)1437-1439
    Number of pages3
    JournalApplied Physics Letters
    Volume75
    Issue number10
    DOIs
    Publication statusPublished - 6 Sept 1999

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