Skip to main navigation Skip to search Skip to main content

Role of ions in SiO2 deposition with pulsed and continuous helicon plasmas

    Research output: Contribution to journal › Article › peer-review

    Fingerprint

    Dive into the research topics of 'Role of ions in SiO2 deposition with pulsed and continuous helicon plasmas'. Together they form a unique fingerprint.
    Sort by

    Material Science

    Physics

    Chemical Engineering

    Engineering