Rutherford backscattering using electrons as projectiles: Underlying principles and possible applications

M. R. Went, M. Vos*

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    29 Citations (Scopus)

    Abstract

    Ion beam analysis is the method of choice for studying the composition of layers with a thickness exceeding several tens of Å. Recently it has become clear that elastic scattering of keV electrons can be used to determine the surface composition of relatively thick layers (up to 1000 Å) in a way very similar to ion scattering experiments. These electron-scattering experiments share much of the underlying physics of electron spectroscopy and ion scattering. In this paper we systematically describe the similarities and differences between the electron-scattering experiments and the ion-beam experiments and illustrate this description with relevant electron-scattering examples.

    Original languageEnglish
    Pages (from-to)998-1011
    Number of pages14
    JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    Volume266
    Issue number6
    DOIs
    Publication statusPublished - Mar 2008

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