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Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
S. M. Kluth*, D. Álvarez, St Trellenkamp, J. Moers, S. Mantl, J. Kretz, W. Vandervorst
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
17
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(Scopus)