"Scratching" carbon nanotubes onto Si substrates

Jun Yu*, Ying Chen

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    1 Citation (Scopus)

    Abstract

    Large-scale, high-density, and patterned carbon nanotubes (CNTs) on both pure Si and quartz (SiO2) substrates have been produced using different approaches. The CNTs were synthesized by pyrolysis of the ball-milled iron phthalocyanine (FePc) in a tube furnace under a Ar-5% H2 gas flow. Because patterned CNTs are difficult to grow directly on smooth and perfect single-crystalline Si wafer surface, mechanical scratches were created to help the selective deposition and growth of CNTs on the scratched areas. This simple process does not require pre-deposition of any metal catalysts. For SiO2 substrates, which can be readily covered by a CNT film, patterned CNTs are produced using a TEM grid as mask to cover the areas where CNTs are not needed. The growth temperature and vapor density have strong influence on the patterned CNT formation.

    Original languageEnglish
    Title of host publicationOrganic and Inorganic Nanotubes
    Subtitle of host publicationFrom Molecular to Submicron Structures
    Pages55-60
    Number of pages6
    Publication statusPublished - 2006
    Event2006 MRS Spring Meeting - San Francisco, CA, United States
    Duration: 17 Apr 200621 Apr 2006

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume922
    ISSN (Print)0272-9172

    Conference

    Conference2006 MRS Spring Meeting
    Country/TerritoryUnited States
    CitySan Francisco, CA
    Period17/04/0621/04/06

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