Abstract
Crystalline Si/SiOx core/shell nanowires(NWs) are self-assembled by annealing Ni-coated hydrogenated Si-rich SiOx (SRO:H) films at 1100 °C in the presence of Si powder. Plasma-enhanced chemical vapor deposition is used to grow 100nm SRO:H thin films with varying silicon concentration (nSi). The NWs vary from SiOx nanowires to Si/SiOx core/shell structures depending on the composition of the SRO:H substrate, with the fraction of core/shell structures increasing with increasing Si concentration. As nSi increases from 37 to 43at.%, the average diameter of the NWs also increases from 48 to 157nm. A growth model based on the diffusion-assisted vapor-liquid-solid mechanism is proposed to explain how the core/shell structures are self-assembled. Photoluminescence(PL) spectra of the individual NWs have two major emission bands in the near UV (381nm) and blue (423nm) ranges at nSi = 43at.%, named as UV and BL PL bands, respectively. In contrast, only the BL PL band is observed at n Si ≤ 39at.%. These results suggest that the BL and UV PL bands can be attributed to the defect states in the SiOx shell and at the Si core/SiOx shell interface, respectively, and that the BL band is closely related to the growth process of the NWs.
Original language | English |
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Article number | 205601 |
Journal | Nanotechnology |
Volume | 21 |
Issue number | 20 |
DOIs | |
Publication status | Published - 2010 |