Self-ion-induced swelling of germanium

B. Stritzker; R. G. Elliman; J. Zou

doi:10.1016/S0168-583X(00)00597-8

Self-ion-induced swelling of germanium

B. Stritzker^*, R. G. Elliman, J. Zou

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

61 Citations (Scopus)

Abstract

Ge substrates of (100) orientation were irradiated with 1.0 MeV Ge ions at temperatures in the range from -180°C to 500°C. Pronounced swelling of the irradiated material up to 4000 Å, associated with the formation of a porous surface layer, was evident only for temperatures between -50°C and 200°C. The extent of swelling was found to be insensitive to temperature in this range and exhibited an approximately linear dose dependence for doses up to 1 × 10¹⁷ Ge cm^-2. For temperatures outside this range, only sputtering effects were observed. The structure of the porous surface layer was examined by transmission electron microscopy. For samples irradiated at 22°C, it was shown to have a density ∼30% that of bulk Ge. These layers were further shown to be stable during subsequent annealing to 500°C.

Original language	English
Pages (from-to)	193-196
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	175-177
DOIs	https://doi.org/10.1016/S0168-583X(00)00597-8
Publication status	Published - Apr 2001
Event	12th International Conference on Ion Beam Modification of Materials - Rio Grande do Sul, Brazil Duration: 3 Sept 2000 → 8 Sept 2000

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title = "Self-ion-induced swelling of germanium",

abstract = "Ge substrates of (100) orientation were irradiated with 1.0 MeV Ge ions at temperatures in the range from -180°C to 500°C. Pronounced swelling of the irradiated material up to 4000 {\AA}, associated with the formation of a porous surface layer, was evident only for temperatures between -50°C and 200°C. The extent of swelling was found to be insensitive to temperature in this range and exhibited an approximately linear dose dependence for doses up to 1 × 1017 Ge cm-2. For temperatures outside this range, only sputtering effects were observed. The structure of the porous surface layer was examined by transmission electron microscopy. For samples irradiated at 22°C, it was shown to have a density ∼30% that of bulk Ge. These layers were further shown to be stable during subsequent annealing to 500°C.",

keywords = "Ge self-ion irradiation, Porous germanium, Swelling",

author = "B. Stritzker and Elliman, {R. G.} and J. Zou",

year = "2001",

month = apr,

doi = "10.1016/S0168-583X(00)00597-8",

language = "English",

volume = "175-177",

pages = "193--196",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

note = "12th International Conference on Ion Beam Modification of Materials ; Conference date: 03-09-2000 Through 08-09-2000",

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TY - JOUR

T1 - Self-ion-induced swelling of germanium

AU - Stritzker, B.

AU - Elliman, R. G.

AU - Zou, J.

PY - 2001/4

Y1 - 2001/4

N2 - Ge substrates of (100) orientation were irradiated with 1.0 MeV Ge ions at temperatures in the range from -180°C to 500°C. Pronounced swelling of the irradiated material up to 4000 Å, associated with the formation of a porous surface layer, was evident only for temperatures between -50°C and 200°C. The extent of swelling was found to be insensitive to temperature in this range and exhibited an approximately linear dose dependence for doses up to 1 × 1017 Ge cm-2. For temperatures outside this range, only sputtering effects were observed. The structure of the porous surface layer was examined by transmission electron microscopy. For samples irradiated at 22°C, it was shown to have a density ∼30% that of bulk Ge. These layers were further shown to be stable during subsequent annealing to 500°C.

AB - Ge substrates of (100) orientation were irradiated with 1.0 MeV Ge ions at temperatures in the range from -180°C to 500°C. Pronounced swelling of the irradiated material up to 4000 Å, associated with the formation of a porous surface layer, was evident only for temperatures between -50°C and 200°C. The extent of swelling was found to be insensitive to temperature in this range and exhibited an approximately linear dose dependence for doses up to 1 × 1017 Ge cm-2. For temperatures outside this range, only sputtering effects were observed. The structure of the porous surface layer was examined by transmission electron microscopy. For samples irradiated at 22°C, it was shown to have a density ∼30% that of bulk Ge. These layers were further shown to be stable during subsequent annealing to 500°C.

KW - Ge self-ion irradiation

KW - Porous germanium

KW - Swelling

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U2 - 10.1016/S0168-583X(00)00597-8

DO - 10.1016/S0168-583X(00)00597-8

M3 - Conference article

SN - 0168-583X

VL - 175-177

SP - 193

EP - 196

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

T2 - 12th International Conference on Ion Beam Modification of Materials

Y2 - 3 September 2000 through 8 September 2000

ER -

Self-ion-induced swelling of germanium

Abstract

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