Self-limited underdense microplasmas in bulk silicon induced by ultrashort laser pulses

Alexandros Mouskeftaras, Andrei V. Rode, Raphaël Clady, Marc Sentis, Olivier Utéza, David Grojo

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    54 Citations (Scopus)

    Abstract

    Two-photon ionization by focused femtosecond laser pulses initiates the development of micrometer-scale plasmas in the bulk of silicon. Using pump-and-probe transmission microscopy with infrared light, we investigate the space-time characteristics of these plasmas for laser intensities up to 1012W/cm2. The measurements reveal a self-limitation of the excitation at a maximum free-carrier density of ≅1019 cm-3, which is more than one order of magnitude below the threshold for permanent modification. The plasmas remain unchanged in the ∼100 ps timescale revealing slow carrier kinetics. The results underline the limits in local control of silicon dielectric permittivity, which are inherent to the use of single near-infrared ultrashort Gaussian pulses.

    Original languageEnglish
    Article number191103
    JournalApplied Physics Letters
    Volume105
    Issue number19
    DOIs
    Publication statusPublished - 10 Nov 2014

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