Original language | English |
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Publication status | Published - 31 May 2019 |
Si3N4/SiO2 Coating of Deep Nanoscale Silicon leading to p/n-Behaviour (invited talk)
Dirk Koenig*, Daniel Hiller, Noël Wilck, Birger Berghoff, Merlin Müller, Giovanni Di Santo, Luca Petaccia, Joachim Mayer, Sean C. Smith, Joachim Knoch
*Corresponding author for this work
Research output: Contribution to conference › Abstract › peer-review