Si3N4/SiO2 Coating of Deep Nanoscale Silicon leading to p/n-Behaviour (invited talk)

Dirk Koenig*, Daniel Hiller, Noël Wilck, Birger Berghoff, Merlin Müller, Giovanni Di Santo, Luca Petaccia, Joachim Mayer, Sean C. Smith, Joachim Knoch

*Corresponding author for this work

    Research output: Contribution to conferenceAbstractpeer-review

    Original languageEnglish
    Publication statusPublished - 31 May 2019

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