Sidewall slopes of SU-8 HARMST using deep x-ray lithography

K. D. Vora; B. Y. Shew; E. C. Harvey; J. P. Hayes; A. G. Peele

doi:10.1088/0960-1317/18/3/035037

Sidewall slopes of SU-8 HARMST using deep x-ray lithography

K. D. Vora, B. Y. Shew, E. C. Harvey, J. P. Hayes, A. G. Peele

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

We describe a model that predicts sidewall slope in SU-8 high aspect ratio microstructures made using x-ray lithography. Our experimental results are in accordance with our model and we demonstrate that essentially zero sidewall taper can be obtained under certain conditions. We use our results to explore the feasibility of optimizing a structure simultaneously for slope and surface roughness.

Original language	English
Article number	035037
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/18/3/035037
Publication status	Published - 1 Mar 2008
Externally published	Yes

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10.1088/0960-1317/18/3/035037

Cite this

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title = "Sidewall slopes of SU-8 HARMST using deep x-ray lithography",

abstract = "We describe a model that predicts sidewall slope in SU-8 high aspect ratio microstructures made using x-ray lithography. Our experimental results are in accordance with our model and we demonstrate that essentially zero sidewall taper can be obtained under certain conditions. We use our results to explore the feasibility of optimizing a structure simultaneously for slope and surface roughness.",

author = "Vora, {K. D.} and Shew, {B. Y.} and Harvey, {E. C.} and Hayes, {J. P.} and Peele, {A. G.}",

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AU - Harvey, E. C.

AU - Hayes, J. P.

AU - Peele, A. G.

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AB - We describe a model that predicts sidewall slope in SU-8 high aspect ratio microstructures made using x-ray lithography. Our experimental results are in accordance with our model and we demonstrate that essentially zero sidewall taper can be obtained under certain conditions. We use our results to explore the feasibility of optimizing a structure simultaneously for slope and surface roughness.

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

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Sidewall slopes of SU-8 HARMST using deep x-ray lithography

Abstract

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