Abstract
This paper presents the experimental demonstration of silicon solar cells that incorporate an enhanced MIS passivated contact scheme on a phosphorus diffused surface. By depositing intrinsic a-Si:H on an ultrathin SiOx layer and alloying with an overlying aluminium layer, the interface passivation has been vastly improved over that of conventional MIS contacts, whilst maintaining a low contact resistance. This paper focuses on the optimisation of the Al/a-Si:H alloying process and the influence of the tunnelling SiOx layer thickness. A conversion efficiency of 21.0% has been achieved for n-type cells fabricated with a front boron diffusion and a full area rear MIS passivated phosphorus diffusion. The cells exhibit a moderate Voc=666 mV and FF=0.805, whereas Jsc 39.3 mA/cm2 is relatively low due to a non-optimal antireflection coating and back surface reflector, and hence will be subject to further improvement.
Original language | English |
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Pages (from-to) | 22-25 |
Number of pages | 4 |
Journal | Solar Energy Materials and Solar Cells |
Volume | 138 |
DOIs | |
Publication status | Published - Jul 2015 |