Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

R. Meyer, M. Jacquot, R. Giust, J. Safioui, L. Rapp, L. Furfaro, P. A. Lacourt, J. M. Dudley, F. Courvoisier*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

91 Citations (Scopus)

Abstract

Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high-aspect-ratio elliptical channels in glass of a dimension 350 nm × 710 nm and subsequent cleaved surface uniformity at the sub-micron level.

Original languageEnglish
Pages (from-to)4307-4310
Number of pages4
JournalOptics Letters
Volume42
Issue number21
DOIs
Publication statusPublished - 1 Nov 2017
Externally publishedYes

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