Site-specific recoil diffraction of backscattered electrons in crystals

A novel diffraction effect in high-energy electron backscattering is demonstrated: the formation of element-specific diffraction patterns via nuclear recoil. For sapphire (Al₂O₃), the difference in recoil energy allows us to determine if an electron scattered from aluminum or from oxygen. The angular electron distribution obtained in such measurements is a strong function of the recoiling lattice site. These element-specific recoil diffraction features are explained using the dynamical theory of electron diffraction. Our observations open up new possibilities for local, element-resolved crystallographic analysis using quasielastically backscattered electrons in scanning electron microscopy.