Solubility limit and precipitate formation in Al-doped 4H-SiC epitaxial material
- M. K. Linnarsson*
- , M. S. Janson
- , U. Zimmermann
- , B. G. Svensson
- , P. O.Å Persson
- , L. Hultman
- , J. Wong-Leung
- , S. Karlsson
- , A. Schöner
- , H. Bleichner
- , E. Olsson
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
48
Citations
(Scopus)