Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography

Nikolai R. Lobanov; Thomas Tunningley; Peter Linardakis

doi:10.1016/j.nima.2022.167016

Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography

Nikolai R. Lobanov^*, Thomas Tunningley, Peter Linardakis

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In Caesium sputter ion sources of negative ions, SNICS, an accurate reconstruction of pit profiles is important to assess the efficiency of cathode material utilization to increase the output of negative ions. Highly accurate pit profile measurements in sputter cathodes are difficult to perform for geometries where the depth is large compared to the diameter. In this paper, optical confocal microscopy, stylus profilometry and X-ray micro-computer tomography are used successfully to reliably reconstruct such high aspect ratio cathode pit geometries. Simulations of Cs⁺ beam trajectories and calculated cross-sectional current density distributions are consistent with the observed pit profiles. Experimental results demonstrate the practicability of the proposed measurement techniques for SNICS cathodes and other structures with complex surface topographies.

Original language	English
Article number	167016
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	1039
DOIs	https://doi.org/10.1016/j.nima.2022.167016
Publication status	Published - 11 Sept 2022

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10.1016/j.nima.2022.167016

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Lobanov, N. R., Tunningley, T., & Linardakis, P. (2022). Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1039, Article 167016. https://doi.org/10.1016/j.nima.2022.167016

@article{70ba354eecdd4deb8acb8b12030355f8,

title = "Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography",

abstract = "In Caesium sputter ion sources of negative ions, SNICS, an accurate reconstruction of pit profiles is important to assess the efficiency of cathode material utilization to increase the output of negative ions. Highly accurate pit profile measurements in sputter cathodes are difficult to perform for geometries where the depth is large compared to the diameter. In this paper, optical confocal microscopy, stylus profilometry and X-ray micro-computer tomography are used successfully to reliably reconstruct such high aspect ratio cathode pit geometries. Simulations of Cs+ beam trajectories and calculated cross-sectional current density distributions are consistent with the observed pit profiles. Experimental results demonstrate the practicability of the proposed measurement techniques for SNICS cathodes and other structures with complex surface topographies.",

keywords = "Caesium sputter ion source, Cathode sputter pit, Confocal microscopy, Stylus profilometer, X-ray micro-computer tomography",

author = "Lobanov, {Nikolai R.} and Thomas Tunningley and Peter Linardakis",

note = "Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2022",

month = sep,

day = "11",

doi = "10.1016/j.nima.2022.167016",

language = "English",

volume = "1039",

journal = "Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

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Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography. / Lobanov, Nikolai R.; Tunningley, Thomas; Linardakis, Peter.
In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 1039, 167016, 11.09.2022.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography

AU - Lobanov, Nikolai R.

AU - Tunningley, Thomas

AU - Linardakis, Peter

PY - 2022/9/11

Y1 - 2022/9/11

N2 - In Caesium sputter ion sources of negative ions, SNICS, an accurate reconstruction of pit profiles is important to assess the efficiency of cathode material utilization to increase the output of negative ions. Highly accurate pit profile measurements in sputter cathodes are difficult to perform for geometries where the depth is large compared to the diameter. In this paper, optical confocal microscopy, stylus profilometry and X-ray micro-computer tomography are used successfully to reliably reconstruct such high aspect ratio cathode pit geometries. Simulations of Cs+ beam trajectories and calculated cross-sectional current density distributions are consistent with the observed pit profiles. Experimental results demonstrate the practicability of the proposed measurement techniques for SNICS cathodes and other structures with complex surface topographies.

AB - In Caesium sputter ion sources of negative ions, SNICS, an accurate reconstruction of pit profiles is important to assess the efficiency of cathode material utilization to increase the output of negative ions. Highly accurate pit profile measurements in sputter cathodes are difficult to perform for geometries where the depth is large compared to the diameter. In this paper, optical confocal microscopy, stylus profilometry and X-ray micro-computer tomography are used successfully to reliably reconstruct such high aspect ratio cathode pit geometries. Simulations of Cs+ beam trajectories and calculated cross-sectional current density distributions are consistent with the observed pit profiles. Experimental results demonstrate the practicability of the proposed measurement techniques for SNICS cathodes and other structures with complex surface topographies.

KW - Caesium sputter ion source

KW - Cathode sputter pit

KW - Confocal microscopy

KW - Stylus profilometer

KW - X-ray micro-computer tomography

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U2 - 10.1016/j.nima.2022.167016

DO - 10.1016/j.nima.2022.167016

M3 - Article

SN - 0168-9002

VL - 1039

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

M1 - 167016

ER -

Sputter ion source cathode pit reconstruction by stylus profilometer, optical techniques and X-ray micro computed tomography

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