Stoichiometric low loss tellurium oxide thin films for photonic applications

Khu T. Vu, Steve J. Madden, Barry Luther-Davies, Douglas Bulla

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    2 Citations (Scopus)

    Abstract

    Stoichiometric low loss Tellurium Oxide, TeO2, films have been produced by reactive RF sputtering. TeO2 films with propagation loss below 0.1dB/cm at 1550nm have been achieved in as deposited films.

    Original languageEnglish
    Title of host publication2008 Joint Conference of the Opto-Electronics and Communications Conference and the Australian Conference On Optical Fibre Technology, OECC/ACOFT 2008
    DOIs
    Publication statusPublished - 2008
    Event2008 Joint Conference of the Opto-Electronics and Communications Conference and the Australian Conference On Optical Fibre Technology, OECC/ACOFT 2008 - Sydney, NSW, Australia
    Duration: 7 Jul 200810 Jul 2008

    Publication series

    Name2008 Joint Conference of the Opto-Electronics and Communications Conference and the Australian Conference On Optical Fibre Technology, OECC/ACOFT 2008

    Conference

    Conference2008 Joint Conference of the Opto-Electronics and Communications Conference and the Australian Conference On Optical Fibre Technology, OECC/ACOFT 2008
    Country/TerritoryAustralia
    CitySydney, NSW
    Period7/07/0810/07/08

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