Structural and elastic characterization of Cu-implanted SiO2 films on Si(100) substrates
- J. Shirokoff*
- , C. K. Young
- , L. C. Brits
- , G. T. Andrews
- , B. Johannessen
- , M. C. Ridgway
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)