@inproceedings{88e9512526154a31959a1a34d2103948,
title = "Structural, Electrical and Optical Properties of MEV As+ Ion Implanted InP",
author = "C Carmody and Hoe Tan and Chennupati Jagadish and Jin Zou and Dao, {Lap Van} and Michael Gal",
year = "2003",
language = "English",
isbn = "0780375718",
pages = "487--490",
editor = "{Michael Gal}",
booktitle = "2002 Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",
edition = "Peer Reviewed",
note = "Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2002) ; Conference date: 01-01-2003",
}