Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

O F Vyvenko; R Sachdeva; A A Istratov; R Armitage; E R Weber; Prakash Deenapanray; Chennupati Jagadish; Yue Gao; H R Huff

Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

O F Vyvenko, R Sachdeva, A A Istratov, R Armitage, E R Weber, Prakash Deenapanray, Chennupati Jagadish, Yue Gao, H R Huff

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology
Editors	H R Huff, L Fabry, S Kishino
Place of Publication	Pennington NJ
Publisher	Electrochemical Society Inc
Pages	440-451
Edition	Peer Reviewed
ISBN (Print)	1566773733
Publication status	Published - 2002
Event	Semiconductor Silicon 2002 - Philadelphia, Pennsylvania, USA Duration: 1 Jan 2002 → …

Conference

Conference	Semiconductor Silicon 2002
Period	1/01/02 → …
Other	Mar 22 2002

Cite this

Vyvenko, O. F., Sachdeva, R., Istratov, A. A., Armitage, R., Weber, E. R., Deenapanray, P., Jagadish, C., Gao, Y., & Huff, H. R. (2002). Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon. In H. R. H. L. F. S. K. (Ed.), Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology (Peer Reviewed ed., pp. 440-451). Electrochemical Society Inc.

@inproceedings{3b63a9730ef746b9b4b1b0303de986ab,

title = "Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon",

author = "Vyvenko, {O F} and R Sachdeva and Istratov, {A A} and R Armitage and Weber, {E R} and Prakash Deenapanray and Chennupati Jagadish and Yue Gao and Huff, {H R}",

year = "2002",

language = "English",

isbn = "1566773733",

pages = "440--451",

editor = "{H R Huff, L Fabry, S Kishino}",

booktitle = "Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology",

publisher = "Electrochemical Society Inc",

edition = "Peer Reviewed",

note = "Semiconductor Silicon 2002 ; Conference date: 01-01-2002",

}

Vyvenko, OF, Sachdeva, R, Istratov, AA, Armitage, R, Weber, ER, Deenapanray, P, Jagadish, C, Gao, Y & Huff, HR 2002, Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon. in HRHLFSK (ed.), Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology. Peer Reviewed edn, Electrochemical Society Inc, Pennington NJ, pp. 440-451, Semiconductor Silicon 2002, 1/01/02.

Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon. / Vyvenko, O F; Sachdeva, R; Istratov, A A et al.
Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology. ed. / H R Huff, L Fabry, S Kishino. Peer Reviewed. ed. Pennington NJ: Electrochemical Society Inc, 2002. p. 440-451.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

AU - Vyvenko, O F

AU - Sachdeva, R

AU - Istratov, A A

AU - Armitage, R

AU - Weber, E R

AU - Deenapanray, Prakash

AU - Jagadish, Chennupati

AU - Gao, Yue

AU - Huff, H R

PY - 2002

Y1 - 2002

M3 - Conference contribution

SN - 1566773733

SP - 440

EP - 451

BT - Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology

A2 - null, H R Huff, L Fabry, S Kishino

PB - Electrochemical Society Inc

CY - Pennington NJ

T2 - Semiconductor Silicon 2002

Y2 - 1 January 2002

ER -