@inproceedings{224b26e23ec0414ab65b30b490eed9d8,
title = "Surface passivation of black silicon by thermal ALD deposited aluminum oxide",
abstract = "Black silicon (bSi) surfaces can be effectivly passivated by thermal ALD. The nanosturcures with aspect ratios up to 10 show excellent anti-reflection and light-trapping properties with absorption in the visible spectrum of over 97\%.",
author = "M. Otto and M. Kroll and T. K{\"a}sebier and M. Ernst and R. Salzer and Wehrspohn, \{R. B.\}",
year = "2011",
doi = "10.1364/e2.2011.jwe7",
language = "English",
isbn = "9781557529206",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group",
booktitle = "Optical Instrumentation for Energy and Environmental Applications 2011",
address = "United States",
note = "Solid-State and Organic Lighting, SOLED 2011 ; Conference date: 02-11-2011 Through 03-11-2011",
}