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Surface passivation of boron-diffused p-type silicon surfaces with (1 0 0) and (1 1 1) orientations by ALD Al2O3 layers

  • Wensheng Liang*
  • , Klaus J. Weber
  • , Dongchul Suh
  • , Sieu P. Phang
  • , Jun Yu
  • , Andrew K. McAuley
  • , Bridget R. Legg
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    35 Citations (Scopus)

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