Surface passivation of boron-diffused p-type silicon surfaces with (1 0 0) and (1 1 1) orientations by ALD Al2O3 layers

Wensheng Liang*, Klaus J. Weber, Dongchul Suh, Sieu P. Phang, Jun Yu, Andrew K. McAuley, Bridget R. Legg

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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