Synthesis of III-Nx-V1-x thin films by N ion implantation

Kin Man Yu; W Walukiewicz; Wei Shan; J Wu; J W Beeman; J W Ager; E E Haller; Mark C Ridgway

doi:10.1557/PROC-647-O13.3/R8.3

Synthesis of III-N_x-V_1-x thin films by N ion implantation

Kin Man Yu, W Walukiewicz, Wei Shan, J Wu, J W Beeman, J W Ager, E E Haller, Mark C Ridgway

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials
Editors	Moss, S; Heinig, K.-H; Poker, D.B
Place of Publication	Warrendale, USA
Publisher	SPRINGER NATURAL LINK
Pages	013.3.1/R8.3.1-013.3.6/R8.3.6
Edition	Peer Reviewed
ISBN (Print)	1558995579
DOIs	https://doi.org/10.1557/PROC-647-O13.3/R8.3
Publication status	Published - 2001
Event	2000 MRS Fall Meeting and Exhibit - Boston, United States Duration: 27 Nov 1999 → 1 Dec 1999 https://www.mrs.org/fall2000/

Conference

Conference	2000 MRS Fall Meeting and Exhibit
Country/Territory	United States
City	Boston
Period	27/11/99 → 1/12/99
Internet address	https://www.mrs.org/fall2000/

Access to Document

10.1557/PROC-647-O13.3/R8.3

Cite this

Yu, K. M., Walukiewicz, W., Shan, W., Wu, J., Beeman, J. W., Ager, J. W., Haller, E. E., & Ridgway, M. C. (2001). Synthesis of III-N_x-V_1-x thin films by N ion implantation. In M. S. H. K. .-H. P. D. B. (Ed.), Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials (Peer Reviewed ed., pp. 013.3.1/R8.3.1-013.3.6/R8.3.6). SPRINGER NATURAL LINK. https://doi.org/10.1557/PROC-647-O13.3/R8.3

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title = "Synthesis of III-Nx-V1-x thin films by N ion implantation",

author = "Yu, {Kin Man} and W Walukiewicz and Wei Shan and J Wu and Beeman, {J W} and Ager, {J W} and Haller, {E E} and Ridgway, {Mark C}",

year = "2001",

doi = "10.1557/PROC-647-O13.3/R8.3",

language = "English",

isbn = "1558995579",

pages = "013.3.1/R8.3.1--013.3.6/R8.3.6",

editor = "{Moss, S; Heinig, K.-H; Poker, D.B}",

booktitle = "Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials",

publisher = "SPRINGER NATURAL LINK",

edition = "Peer Reviewed",

note = "2000 MRS Fall Meeting and Exhibit ; Conference date: 27-11-1999 Through 01-12-1999",

url = "https://www.mrs.org/fall2000/",

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Yu, KM, Walukiewicz, W, Shan, W, Wu, J, Beeman, JW, Ager, JW, Haller, EE & Ridgway, MC 2001, Synthesis of III-N_x-V_1-x thin films by N ion implantation. in MSHK-HPDB (ed.), Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials. Peer Reviewed edn, SPRINGER NATURAL LINK, Warrendale, USA, pp. 013.3.1/R8.3.1-013.3.6/R8.3.6, 2000 MRS Fall Meeting and Exhibit, Boston, Massachusetts, United States, 27/11/99. https://doi.org/10.1557/PROC-647-O13.3/R8.3

Synthesis of III-N_x-V_1-x thin films by N ion implantation. / Yu, Kin Man; Walukiewicz, W; Shan, Wei et al.
Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials. ed. / Moss, S; Heinig, K.-H; Poker, D.B. Peer Reviewed. ed. Warrendale, USA: SPRINGER NATURAL LINK, 2001. p. 013.3.1/R8.3.1-013.3.6/R8.3.6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Synthesis of III-Nx-V1-x thin films by N ion implantation

AU - Yu, Kin Man

AU - Walukiewicz, W

AU - Shan, Wei

AU - Wu, J

AU - Beeman, J W

AU - Ager, J W

AU - Haller, E E

AU - Ridgway, Mark C

PY - 2001

Y1 - 2001

U2 - 10.1557/PROC-647-O13.3/R8.3

DO - 10.1557/PROC-647-O13.3/R8.3

M3 - Conference contribution

SN - 1558995579

SP - 013.3.1/R8.3.1-013.3.6/R8.3.6

BT - Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials

A2 - null, Moss, S; Heinig, K.-H; Poker, D.B

PB - SPRINGER NATURAL LINK

CY - Warrendale, USA

T2 - 2000 MRS Fall Meeting and Exhibit

Y2 - 27 November 1999 through 1 December 1999

ER -

Yu KM, Walukiewicz W, Shan W, Wu J, Beeman JW, Ager JW et al. Synthesis of III-N_x-V_1-x thin films by N ion implantation. In MSHKHPDB, editor, Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials. Peer Reviewed ed. Warrendale, USA: SPRINGER NATURAL LINK. 2001. p. 013.3.1/R8.3.1-013.3.6/R8.3.6 doi: 10.1557/PROC-647-O13.3/R8.3