Synthesis of nickel disilicide nanocrystal monolayers for nonvolatile memory applications

Jong Hwan Yoon*, Robert G. Elliman

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    Nickel silicide nanocrystals (NCs) were formed by thermally annealing SiOxNy films either implanted with Ni or coated with an evaporated Ni film. It is observed that the NCs grow into well-defined single crystalline structures embedded in a SiOxNy matrix, and that their size can be directly controlled by adjusting the concentrations of either silicon or nickel in the SiOxNy layer. The formation of well-defined NC monolayers was also demonstrated by depositing an ultra-thin Ni layer between two SiOxNy layers. These structures are shown to exhibit characteristic capacitance-voltage hysteresis suitable for nonvolatile memory applications.

    Original languageEnglish
    Title of host publicationMaterials Research Society Symposium Proceedings - Materials Science and Technology for Nonvolatile Memories
    PublisherMaterials Research Society
    Pages49-54
    Number of pages6
    ISBN (Print)9781605110417
    DOIs
    Publication statusPublished - 2008
    EventMaterials Science and Technology for Nonvolatile Memories - San Francisco, CA, United States
    Duration: 24 Mar 200827 Mar 2008

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume1071
    ISSN (Print)0272-9172

    Conference

    ConferenceMaterials Science and Technology for Nonvolatile Memories
    Country/TerritoryUnited States
    CitySan Francisco, CA
    Period24/03/0827/03/08

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