Tailored nanostructures for microgassensors by flame spray pyrolysis

Integration of nanoparticle synthesis and deposition in micro-machining processes is a mandatory step toward development of nanodevices. Indeed, large scale production of tailored particles is achievable in aerosol reactors. Direct deposition from the aerosol leads to formation of nanostructured layers avoiding the cumbersome steps of wet-methods. Nevertheless, improvement of nanoparticle cohesion and adhesion by isothermal sintering results in deterioration of the device performance due to crystal and grain growth. Furthermore, sufficient stabilisation is not always possible at substrate compatible temperatures. Here, we describe the synthesis and deposition of SnO₂, TiO₂ and SnO₂-SiO₂ nanostructured layers that can be utilised for micro-machined gas sensors.