@inproceedings{ec64c89a797c430181254866e50439f9,
title = "Tellurium oxide thin film waveguides for integrated photonics",
abstract = "We report the fabrication of Tellurium oxide films with deposited propagation losses that are sufficiently low to allow the fabrication of high quality planar integrated optical devices. Stoichiometric low loss films were produced by reactive magnetron RF sputtering and the effect of a wide range of sputtering parameters on stoichiometry, refractive index, Raman spectra and optical loss of thin films were investigated. As deposited TeO 2 films with propagation losses below 0.1 dB/cm at 1550nm have been achieved which are therefore well suited for integrated optical applications.",
author = "Vu, {Khu T.} and Madden, {Steve J.}",
year = "2012",
language = "English",
isbn = "9781118273746",
series = "Ceramic Transactions",
pages = "181--186",
booktitle = "Processing, Properties, and Applications of Glass and Optical Materials - Proceedings of the 9th International Conference on Advances in the Fusion and Processing of Glass, AFPG9",
note = "9th International Conference on Advances in the Fusion and Processing of Glass, AFPG9 and Symposium 15 - Structure, Properties and Photonic Applications of Glasses Held during PACRIM-9 ; Conference date: 10-07-2011 Through 14-07-2011",
}