Abstract
In this study, the effect of growth temperature on the structural properties of Au-catalysed epitaxial GaAs semiconductor nanopillars grown by metal-organic chemical vapour deposition is investigated by electron microscopy. It has been found that the growth temperature plays a significant role on the evolution of side-facets of zinc-blende structured GaAs nanopillars. At a growth temperature of 550 °C, six {112} side-facets are formed; whereas at a higher growth temperature of 600 °C, six {110} side-facets are observed. It is believed that the formation of {112} side-facets is a kinetically dominated process while the formation of {110} side-facets is a thermodynamical process. Besides, the diffusion-induced nanopillar foundations present the same {112} edge side-facets regardless of the growth temperature.
Original language | English |
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Article number | 094004 |
Journal | Semiconductor Science and Technology |
Volume | 31 |
Issue number | 9 |
DOIs | |
Publication status | Published - 25 Aug 2016 |