The hyperionTMIon probe for next generation FIB, SIMS and nano-Ion, implantation

The hyperion^TMIon probe for next generation FIB, SIMS and nano-Ion, implantation

N. S. Smith, P. P. Tesch, N. P. Martin, R. W. Boswell

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Original language	English
Pages (from-to)	312-313
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	15
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927609095300
Publication status	Published - Jul 2009

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title = "The hyperionTMIon probe for next generation FIB, SIMS and nano-Ion, implantation",

author = "Smith, {N. S.} and Tesch, {P. P.} and Martin, {N. P.} and Boswell, {R. W.}",

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AU - Smith, N. S.

AU - Tesch, P. P.

AU - Martin, N. P.

AU - Boswell, R. W.

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