TY - GEN
T1 - The impact of thermal- and photo-annealing of chalcogenide films for optical waveguides
AU - Choi, Duk Yong
AU - Madden, Steve
AU - Wang, Rongping
AU - Luther-Davies, Barry
PY - 2011
Y1 - 2011
N2 - We applied thermal- and band-edge light annealing on an as-deposited As 2S 3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2 dB/cm propagation losses were obtained in the waveguides produced from as-deposited and annealed films, respectively. The waveguides produced from photo-annealed film showed almost the same propagation losses to those from thermally-annealed material. Our results, however, indicate optical-annealing provides some advantages over thermal annealing for waveguide fabrication, such as the absence of film cracking which observed at high temperature processing.
AB - We applied thermal- and band-edge light annealing on an as-deposited As 2S 3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2 dB/cm propagation losses were obtained in the waveguides produced from as-deposited and annealed films, respectively. The waveguides produced from photo-annealed film showed almost the same propagation losses to those from thermally-annealed material. Our results, however, indicate optical-annealing provides some advantages over thermal annealing for waveguide fabrication, such as the absence of film cracking which observed at high temperature processing.
UR - http://www.scopus.com/inward/record.url?scp=84862059750&partnerID=8YFLogxK
U2 - 10.1109/IQEC-CLEO.2011.6193728
DO - 10.1109/IQEC-CLEO.2011.6193728
M3 - Conference contribution
SN - 9780977565771
T3 - 2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.
SP - 1294
EP - 1296
BT - 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf
T2 - 2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011
Y2 - 28 August 2011 through 1 September 2011
ER -