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The indentation hardness of silicon measured by instrumented indentation: What does it mean?

  • B. Haberl*
  • , L. B.B. Aji
  • , J. S. Williams
  • , J. E. Bradby
  • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    19 Citations (Scopus)

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