Abstract
Ion tracks in amorphous Fe 80B 20, produced by irradiation with 11.1 MeV/u Au ions, were characterized using synchrotron based small angle X-ray scattering. The tracks resemble long cylindrical structures with a radius of 8.2 ± 0.1 nm. Annealing experiments reveal an activation energy for track recovery E a = 0.39 ± 0.10 eV. Wide angle X-ray scattering measurements of irradiated and unirradiated amorphous Fe 80B 20 samples indicate enhanced recrystallization for the irradiated material.
Original language | English |
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Pages (from-to) | 64-66 |
Number of pages | 3 |
Journal | Microelectronic Engineering |
Volume | 102 |
DOIs | |
Publication status | Published - Feb 2013 |