The role of Fe on the crystallisation of α-Si3N4 from amorphous Si-N formed by ion implantation

Z. L. Li, J. Wong-Leung, P. N.K. Deenapanray, M. Conway, D. J. Chivers, J. D. Fitz Gerald, J. S. Williams*

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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