Theoretical discussion for electron-density distribution in multicusp ion source

Hualin Zhan*, Chundong Hu, Yahong Xie, Bin Wu, Jinfang Wang, Lizheng Liang, Jianglong Wei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a specific region in the sheath are the same with or without magnetic field; 2, the influence of magnetic field on the electron density obeys exponential law, which should take into account the collision term as well if the magnetic field is strong; 3, the result derived from the Boltzmann equation is qualitatively consistent with some given experimental results.

Original languageEnglish
Article number121501
JournalApplied Physics Letters
Volume98
Issue number12
DOIs
Publication statusPublished - 21 Mar 2011
Externally publishedYes

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