Abstract
By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a specific region in the sheath are the same with or without magnetic field; 2, the influence of magnetic field on the electron density obeys exponential law, which should take into account the collision term as well if the magnetic field is strong; 3, the result derived from the Boltzmann equation is qualitatively consistent with some given experimental results.
Original language | English |
---|---|
Article number | 121501 |
Journal | Applied Physics Letters |
Volume | 98 |
Issue number | 12 |
DOIs | |
Publication status | Published - 21 Mar 2011 |
Externally published | Yes |