Thermal stability of sputter deposited hafnium oxide films

Muhammad Nawaz (Saleh); Kidane Belay; Rob Elliman

Thermal stability of sputter deposited hafnium oxide films

Muhammad Nawaz (Saleh)
, Kidane Belay
, Rob Elliman

Research output: Contribution to journal › Meeting Abstract

Original language	English
Journal	Proceedings of the 15th AINSE Nuclear Techniques of Analysis Conference
Publication status	Published - 2007
Event	15th Australian Conference on Nuclear and Complementary Techniques of Analysis & 9th Vacuum Society of Australia Congress - University of Melbourne, Parkville, Australia Duration: 21 Nov 2007 → 23 Nov 2007 https://apo.ansto.gov.au/server/api/core/bitstreams/04e6f612-c125-4672-a582-baff65aa7d33/content

Cite this

@article{86209038953e4aaa8524f26f0de715fe,

title = "Thermal stability of sputter deposited hafnium oxide films",

author = "\{Nawaz (Saleh)\}, Muhammad and Kidane Belay and Rob Elliman",

year = "2007",

language = "English",

journal = "Proceedings of the 15th AINSE Nuclear Techniques of Analysis Conference",

publisher = "Australian Institute of Nuclear Science and Engineering (AINSE)",

note = "15th Australian Conference on Nuclear and Complementary Techniques of Analysis \& 9th Vacuum Society of Australia Congress, AINSE NCTA 2007 ; Conference date: 21-11-2007 Through 23-11-2007",

url = "https://apo.ansto.gov.au/server/api/core/bitstreams/04e6f612-c125-4672-a582-baff65aa7d33/content",

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TY - JOUR

T1 - Thermal stability of sputter deposited hafnium oxide films

AU - Nawaz (Saleh), Muhammad

AU - Belay, Kidane

AU - Elliman, Rob

PY - 2007

Y1 - 2007

M3 - Meeting Abstract

JO - Proceedings of the 15th AINSE Nuclear Techniques of Analysis Conference

JF - Proceedings of the 15th AINSE Nuclear Techniques of Analysis Conference

T2 - 15th Australian Conference on Nuclear and Complementary Techniques of Analysis & 9th Vacuum Society of Australia Congress

Y2 - 21 November 2007 through 23 November 2007

ER -