Thermal stability of the passivation of phosphorus diffused silicon surfaces by PECVD silicon nitride

Jason Tan, Andres Cuevas, Saul Winderbaum, Kristin Roth

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Original languageEnglish
    Title of host publicationProceedings of the 20th European Photovoltaic Solar Energy Conference
    EditorsW Palz, H Ossenbrink, P Helm
    Place of PublicationMunich, Germany
    PublisherWIP-Renewable Energies
    ISBN (Print)3936338191
    Publication statusPublished - 2005
    EventEuropean Photovoltaic Solar Energy Conference 2005 - Barcelona Spain
    Duration: 1 Jan 2005 → …


    ConferenceEuropean Photovoltaic Solar Energy Conference 2005
    Period1/01/05 → …
    OtherJune 6 2005
    Internet address

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