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Thermally Stable Epiwafers for PV Applications

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Abstract

This work assesses the thermal stability of n-type Epiwafers after a boron diffusion based on the carrier lifetime measurements and photoluminescence images. The Epiwafers show a high bulk quality (iVoc > 735-745 mV) in their initial state after passivation with PECVD SiNx:H films. After a customized thermal budget for boron diffusion, the Epiwafers did not show any significant degradation, suggesting their high thermal stability. In contrast, some n-type Czochralski (nCz) silicon control samples degraded significantly (∆i Voc = -30 mV) due to the formation of ring defects during boron diffusion.
Original languageEnglish
Title of host publicationSiliconPV 2025, 15th International Conference on Crystalline Silicon Photovoltaics
EditorsS Bonilla
Number of pages6
Volume3 (2025)
DOIs
Publication statusPublished - 20 Jan 2026

Publication series

NameSiliconpv Conference Proceedings

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