@inproceedings{b4fa8fbae062496cb6e2d23e76f554e6,
title = "Traceable nanoscale length metrology using a metrological Scanning Probe Microscope",
abstract = "We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI meter at NMIA. The instrument will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement.",
keywords = "AFM, interferometry, mSPM, non-contact mode, quartz tuning fork",
author = "Malcolm Lawn and Jan Herrmann and Freund, {Christopher H.} and Miles, {John R.} and Malcolm Gray and Daniel Shaddock and Coleman, {Victoria A.} and J{\"a}mting, {{\AA}sa K.}",
year = "2010",
doi = "10.1117/12.853788",
language = "English",
isbn = "9780819482174",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Scanning Microscopy 2010",
note = "Scanning Microscopy 2010 ; Conference date: 17-05-2010 Through 19-05-2010",
}