Tracking of triangular reference signals using LQG controllers for lateral positioning of an AFM scanner stage

H. Habibullah, H. R. Pota, Ian R. Petersen, M. S. Rana

Research output: Contribution to journalArticlepeer-review

49 Citations (Scopus)

Abstract

This paper presents the design of an internal reference model-based optimal linear quadratic Gaussian (LQG) controller for the lateral positioning of a piezoelectric tube actuator (PTA) used in an atomic force microscope (AFM). In this control design, internal modeling of the reference signal and system error are considered. As a result, the steady-state tracking error is minimized. In addition to the LQG controller, a vibration compensator is incorporated with the plant to suppress the vibration of the PTA at the resonance frequency. It achieves a high closed-loop bandwidth and significant damping of the resonant mode of the PTA, which enables a reference triangular signal to be tracked. Comparison of performance of the optimal LQG controller augmented with a vibration compensator and a PI controller demonstrates that the proposed controller shows significant improvements over the existing AFM PI controller.

Original languageEnglish
Article number6557502
Pages (from-to)1105-1114
Number of pages10
JournalIEEE/ASME Transactions on Mechatronics
Volume19
Issue number4
DOIs
Publication statusPublished - Aug 2014
Externally publishedYes

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