TY - JOUR
T1 - Tracking of triangular reference signals using LQG controllers for lateral positioning of an AFM scanner stage
AU - Habibullah, H.
AU - Pota, H. R.
AU - Petersen, Ian R.
AU - Rana, M. S.
PY - 2014/8
Y1 - 2014/8
N2 - This paper presents the design of an internal reference model-based optimal linear quadratic Gaussian (LQG) controller for the lateral positioning of a piezoelectric tube actuator (PTA) used in an atomic force microscope (AFM). In this control design, internal modeling of the reference signal and system error are considered. As a result, the steady-state tracking error is minimized. In addition to the LQG controller, a vibration compensator is incorporated with the plant to suppress the vibration of the PTA at the resonance frequency. It achieves a high closed-loop bandwidth and significant damping of the resonant mode of the PTA, which enables a reference triangular signal to be tracked. Comparison of performance of the optimal LQG controller augmented with a vibration compensator and a PI controller demonstrates that the proposed controller shows significant improvements over the existing AFM PI controller.
AB - This paper presents the design of an internal reference model-based optimal linear quadratic Gaussian (LQG) controller for the lateral positioning of a piezoelectric tube actuator (PTA) used in an atomic force microscope (AFM). In this control design, internal modeling of the reference signal and system error are considered. As a result, the steady-state tracking error is minimized. In addition to the LQG controller, a vibration compensator is incorporated with the plant to suppress the vibration of the PTA at the resonance frequency. It achieves a high closed-loop bandwidth and significant damping of the resonant mode of the PTA, which enables a reference triangular signal to be tracked. Comparison of performance of the optimal LQG controller augmented with a vibration compensator and a PI controller demonstrates that the proposed controller shows significant improvements over the existing AFM PI controller.
KW - Atomic force microscope (AFM)
KW - linear quadratic Gaussian controller
KW - piezoelectric tube actuator (PTA)
KW - system identification
KW - vibration compensator
UR - http://www.scopus.com/inward/record.url?scp=84900518103&partnerID=8YFLogxK
U2 - 10.1109/TMECH.2013.2270560
DO - 10.1109/TMECH.2013.2270560
M3 - Article
SN - 1083-4435
VL - 19
SP - 1105
EP - 1114
JO - IEEE/ASME Transactions on Mechatronics
JF - IEEE/ASME Transactions on Mechatronics
IS - 4
M1 - 6557502
ER -