Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon

J. E. Bradby; J. S. Williams; J. Wong-Leung; M. V. Swain; P. Munroe

doi:10.1063/1.1332110

Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon

J. E. Bradby, J. S. Williams, J. Wong-Leung, M. V. Swain, P. Munroe

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Abstract

Spherical indentation of crystalline silicon has been studied using cross-sectional transmission electron microscopy (XTEM). Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip planes are visible in the XTEM micrographs in both indentation loads studied. A thin layer of polycrystalline material has been identified (indexed as Si-XII from diffraction patterns) on the low-load indentation. The higher-load indentation revealed a large region of amorphous silicon. The sequence of structural deformation by indentation in silicon has been observed with the initial deformation mechanism being slip until phase transformations can take place.

Original language	English
Pages (from-to)	3749-3751
Number of pages	3
Journal	Applied Physics Letters
Volume	77
Issue number	23
DOIs	https://doi.org/10.1063/1.1332110
Publication status	Published - 4 Dec 2000

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AU - Bradby, J. E.

AU - Williams, J. S.

AU - Wong-Leung, J.

AU - Swain, M. V.

AU - Munroe, P.

PY - 2000/12/4

Y1 - 2000/12/4

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AB - Spherical indentation of crystalline silicon has been studied using cross-sectional transmission electron microscopy (XTEM). Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip planes are visible in the XTEM micrographs in both indentation loads studied. A thin layer of polycrystalline material has been identified (indexed as Si-XII from diffraction patterns) on the low-load indentation. The higher-load indentation revealed a large region of amorphous silicon. The sequence of structural deformation by indentation in silicon has been observed with the initial deformation mechanism being slip until phase transformations can take place.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon

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